KLA-Tencor Surfscan 6220 (SFS6220)

The Surfscan 6220 (SFS6220) wafer surface defects analysis system. The Surfscan 6220 (SFS6220) system is used for wafer surface contamination analysis of unpatterned semiconductor wafers. Condition: refurbished, operational, calibrated and tested. Ready for delivery, crated. Installation and training services are available. Please contact us if interested in the Surfscan 6220 or any other refurbished Surfscan systems (6100, 6200, 6220, 6400, 6420, SP1/TBI) via email a@semiphoton.com or website www.semiphoton.com Thank you! Specifications: • Substrate Sizes: 50mm(2"), 76mm(3"), 100mm(4"), 125mm(5"), 150mm(6"), 200mm(8") wafers • Substrate Material: Silicon or any opaque, polished surface which scatters less than 5% of incident light. • Defect Sensitivity: 0.10µm diameter PSL sphere equivalent with greater than 90% capture rate. • Haze Sensitivity: 0.02ppm • Haze Resolution: 0.002ppm • Repeatability: 0.5% at 1σ (mean count greater than 500, 0.364 µm diameter latex spheres) • Dynamic Range: 0.01µm to 9,999µm in a single measurement.

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• Throughput: Up to 100 w/hr using 150mm wafers • Cassette Handling: Single puck wafer handling from two cassette (one sender/receiver, one receiver) • New Illumination Source: New Solid State Laser with power supply/control box (488 nm, 30mW) • Operator Interface: New LCD monitor, keyboard, mouse • Color coded defect maps, histograms, magnified views of individual defects. • Operation System and Software: Windows 98, ver. 4.2 • Manuals -------------------------------------------------------------------------------------------------------------------------------- Refurbishment process follows all OEM refurbishment procedures to meet OEM installed specification: • Install/Upgrade New Solid State Laser (improved laser lifetime and reduced laser electrical power consumption) • Install/Upgrade New Power Supply/Control Box for the Solid State Laser • Install/Upgrade New Single Board Computer 800MHZ speed • Install/Upgrade New USB 2.0 Ports Thumb Drive (Replaces Floppy Drive) • Install/Upgrade New Color LCD Monitor • Install/Upgrade PDF Software for PDF creation (Replaces Printer) • Install New Wafer Paddle with OEM Moly Substrate • Rebuilt Indexer, Shuttle Drive • Refurbish/Replace Motors, Belts, Bearings • New Lead Screw Nut assembly • New Industrial Solid State Hard Drives • Install/Upgrade Security Key Dallas Chip • New Main Power Supply • Clean or Replace Optics and Mirrors • Refurbish Load Arm and Lead Screw • Refurbish Cassette Elevators and Re-Anodize Plates • Refurbish All Wiring or Replace • Refurbish All Switches or Replace • New User Interface Keypad • New PS/2 Keyboard and PS/2 Optical Mouse • Machine Covers/Frame are cleaned (minor scratches can be present) • System is calibrated on PSL NIST Calibration Standards using OEM test specification guide lines • System is tested to verify compliance to OEM installed specifications • International Shipping Crate --------------------------------------------------------------------------------------------------------------------------------